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Turbomolecular pumps for vacuum solutions.

·Intelligent design, excellent performance, compact size, powerful functionality.

·The complete turbo molecular pump product has a pumping speed ranging from 10 to 2,700 liters per second.

·Higher cost-performance ratio and flexible installation methods.

·High extraction speed is not affected by high load or the intrusion of impurity gases.

·Clean, environmentally friendly, and oil-free.

Applied to:

Photovoltaics, lighting, aerospace, semiconductors, energy, military industry, lasers, home appliances, materials, automobiles, scientific research, etc.

Technical parameters

Model	Turbo-H160/800-FF	Turbo-H160/800-FFD	Turbo-H200/1400-FF	Turbo-H200/1400-FFD
Inlet Diameter	DN160 mm		DN200 mm
Exhaust Diameter	KF40 mm		KF40 mm
Pumping Speed	800 L/s		1400 L/s
Ultimate Pressure	5×10⁻⁷ Pa
Maximum Fore-pressure	100 Pa
For N₂	10⁸
For H₂	1×10⁴
Atmospheric Shock Resistance	Yes
Motor Speed	24,000 r/min
Start-up Time	<10 min
Lubricating Oil Volume	260 mL	/	260 mL	/
Installation Position	Vertical	Any orientation	Vertical	Any orientation
Cooling Method	Water-cooled
Cooling Water Consumption	90 L/h
Cooling Water Temperature	<24°C
Baking Temperature	100±10°C

Model	Turbo - H250/2000 - FF	Turbo - H250/2000 - FFD	Turbo - H400/4000 - FFD	Turbo - H320/3201 - FFD	Turbo - H400/4301 - FFD
Inlet Diameter	DN250mm		DN400mm	DN320mm	DN400mm/VG350mm
Exhaust Diameter	KF40mm		KF40mm
Pumping Speed	2000L/S		4000L/S	3400L/S	4500L/S
Ultimate Pressure	5×10⁻⁷Pa
Maximum Fore-pressure	100Pa
For N₂	10⁸
For H₂	1×10⁴
Can Withstand Atmospheric Pressure	Yes			/
Motor Speed	24000r/min		18000r/min	24000r/min
Start-up Time	<10min		<20min
Lubricating Oil Quantity	260ml	/	260ml	/
Installation Position	Vertical	Any	Vertical	Any
Cooling Method	Water-cooled			Air-cooled
Cooling Water Consumption	90L/h			/
Cooling Water Temperature	<24℃			/
Baking Temperature	100±10℃			/