Turbomolecular vacuum pump

1945

Turbomolecular Vacuum Pump 10-2700L/s, Oil-Free, Compact Design for Semiconductor & PV Manufacturing

Oil-free turbomolecular vacuum pump with broad pumping speed range (10-2,700 L/s) and compact design. Features intelligent control, flexible installation, and high compression ratio for semiconductor, PV, and aerospace applications. Clean operation, no hydrocarbon contamination.

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Turbomolecular pumps for vacuum solutions.

·Intelligent design, excellent performance, compact size, powerful functionality.

·The complete turbo molecular pump product has a pumping speed ranging from 10 to 2,700 liters per second.

·Higher cost-performance ratio and flexible installation methods.

·High extraction speed is not affected by high load or the intrusion of impurity gases.

·Clean, environmentally friendly, and oil-free.

Applied to:

 

Photovoltaics, lighting, aerospace, semiconductors, energy, military industry, lasers, home appliances, materials, automobiles, scientific research, etc.

Technical Parameters

 

Model
Turbo - H600 - M
Turbo - H600 - MD
Turbo - H1200 - M
Turbo - H1200 - MD
Turbo - H1800 - M
Turbo - H1800 - MD
Inlet Diameter
DN160mm
DN200mm
DN250mm
Outlet Diameter
KF40mm
Pumping Speed
600L/S
1200L/S
1800L/S
Ultimate Pressure
5×10⁻⁶Pa
Maximum Fore-pressure
4000Pa
For N₂
10⁷
For H₂
1×10³
Can Withstand Atmospheric Shock
Yes
Motor Speed
24000r/min
Start-up Time
<10min
Lubricating Oil Quantity
260ml
/
260ml
/
260ml
/
Installation Position
Vertical
Any
Vertical
Any
Vertical
Any
Cooling Method
Water-cooling
Cooling Water Consumption
90L/h
Cooling Water Temperature
<24℃
Baking Temperature
100±10℃

Curve diagram

Size installation diagram

Turbomolecular vacuum pump

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