FDS Molecular Vacuum System - 6×10⁻⁶Pa Ultra-High Vacuum, >1600L/s Pump Speed for Semiconductor & Plasma Technology
FDS series molecular vacuum system delivers 6×10⁻⁶Pa ultra-high vacuum and >1600L/s pumping speed. Features dual pump (molecular + dry pump) series design, <5min start time, and air/water cooling. Ideal for semiconductor, plasma technology, and surface analysis applications.
Company Name :
Shanghai AFAPA Vacuum Equipment Co., ltd.Brand :
AFAPA
Vacuum Pump
Vacuum System/Station
Vacuum Accessories
FDS molecular vacuum pump system is ultra-high vacuum equipment, which adopting molecular vacuum pump and dry vacuum pump or double stages rotary vane vacuum pump in series, equipped with pre-pipeline, vacuum valves, molecular vacuum pump power, control box and composite vacuum gauge. Widely used in surface analysis, accelerator technology, semiconductor equipment, plasma technology, electric vacuum device manufacturing and vacuum technology.
Technical Specifications
|
Model
|
FDS600/20
|
FDS1200/40
|
FDS1600/80
|
|
Main Pump
|
F600/150
|
F1200/200
|
F1600/250
|
|
Backing Pump
|
DV16/30/DPS020
|
DV30/54/DPS050
|
DV54/90/DPS080
|
|
Pump Speed(L/S)
|
＞600
|
＞1200
|
＞1600
|
|
Ultimate Vacuum(Pa)
|
6×10(-6)
|
6×10(-6)
|
6×10(-6)
|
|
Inlet Flange
|
DN150
|
DN200
|
DN250
|
|
Outlet Flange
|
KF40
|
KF40
|
KF50
|
|
Voltage(V/Hz)
|
220±20/50
|
220±20/50
|
220±20/50
|
|
Starting Time(Min)
|
＜5
|
＜5
|
＜5
|
|
Cooling Method
|
Air /water Cooled
|
Air /water Cooled
|
water Cooled
|
|
Weight(Kg)
|
28
|
32
|
36
|
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